Combinatorial Uhv Thin Film Deposition , Combinatorial Uhv Thin Film Deposition (Please Refer Technical Specification) , Optional Items , Chiller (2 Kw, 6 Manifold) , Turbo Pump With Capacity Upto 700 Us Along With Controller (Vacuum Range: 1 X 10-8 Torr Or Better) , Rotary Pump (Vacuum Range: 1 X 10-3) Torr Or Better) , Magnetron Sputtering Target Guns (= Inch Diameter) Compatible With Both Dc Sputtering And Rf Sputtering Power Supplies
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Deputy Registrar
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Material Management, IIT Roorkee
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