Laboratory, Optical And Precision Equipment (Excl. Glasses) – Electron Beam Evaporator Coating System. The Institute Of Physics At The University Of Oldenburg Needs An Electron Beam Evaporator Coating System To Produce Very Homogeneous Optical And Metallic Coatings On Structured And Flat Substrates. Bragg Mirrors Should Primarily Be Manufactured From A Titanium Dioxide/Silicon Dioxide Or Silicon Nitride/Silicon Dioxide Layer Stack With Up To 40 Individual Layers And A Total Layer Thickness Of Up To 5Μm. In Addition, The System Should Also Be Able To Produce Thin Metal Layers Using A Thermal Evaporator And Substrate Cleaning Using An Ion Source. The Optical Layers Will Be Measured In-Situ Using A Reflectometry System Already Available In The Working Group. For The Reflectometry System, The Coating System Requires An Interface Through Which The Coating Process Can Be Controlled.
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