Microelectronic Machinery And Apparatus – Supply Of An Electronic Lithography System. The Services Of This Consultation Include: - The Supply Of The Equipment Including Factory Checks And Tests, - Packaging And Delivery To The Cea Premises, - Installation And Commissioning Of The Equipment In The Cea Premises, - On-Site Checks And Tests, - Supply Of All Documents Necessary For The Operation, Maintenance And Upkeep Of The Equipment, - Training In The Use Of The Equipment, -The Warranty Of The Equipment (Including The Supply And Replacement If Necessary Of The Filament And A Preventive Maintenance Visit) For A Period Of One Year From Receipt, -The Maintenance Of The Equipment For A Period Of 3 Years From The End Of The Warranty Period, Including An Annual Preventive Maintenance Visit, Updates To The Equipment Control Software, Telephone Assistance And The Supply And Replacement If Necessary Of The Filament. The Options Are As Follows: -Option 1: Supply Of Software For Correcting Proximity Effects And Advanced Pattern Preparation -Option 2: Supply And Installation Of A Thermal Regulation Device O2.A: 1 Year Warranty Of The Thermal Regulation Device O2.B: 3 Year Maintenance Of The Thermal Regulation Device (As Defined In Firm Phase) O2.C: 3 Year Maintenance Of The Thermal Regulation Device (As Defined In Option 3) -Option 3: Corrective Maintenance Services Unlimited For A Period Of 3 Years From The End Of The Warranty Period
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