Machines And Apparatus For Testing And Measuring – Semi-Automatic Prober For Characterization Of 200 Mm Wafers. The Procurement Comprises The Supply, Delivery, Installation, Commissioning And Integration Of A Semi-Automatic Wafer Prober System For The Electrical And Temperature-Dependent Characterization Of 200 Mm Wafers. The System Shall Be Suitable For Dc And Pulsed I-V Measurements As Well As Low-Frequency Impedance Measurements Up To 10 Mhz And Shall Be Capable Of Integration With The Existing Keithley 4200A-Scs Characterization System. The Scope Of Supply Includes, In Particular, A Shielded Prober Chamber With Temperature-Controlled Chuck (-60 °C To +300 °C), Six Electrical Kelvin Probes With Triaxial Force/Sense Interfaces, Automated Microscope And Camera Systems, Anti-Vibration Table, Hardware And Software Control, Pc And Displays, All Required Cabling And Interfaces, As Well As Installation, Commissioning, Integration Support, Operator Training And Technical Documentation. The Supplier Shall Provide A Complete And Fully Functional System, Including All Components, Interfaces, Accessories And Services Required For Proper Operation And Successful Integration Into The Existing Measurement Environment.
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