Installation Services (Except Software) – Renewal And Expansion Of A Movpe System For Iii-Nitride And 2D Semiconductors. 1. General Description: The University Of Duisburg-Essen Researches Materials, Semiconductor Technologies And Module Integration For Applications In High-Frequency Electronics And Optoelectronics. To Carry Out The Research Work, A Continuous Process Line Is Operated In A Clean Room Up To Class 5 (Iso 14644-1). In Order To Produce Iii-Nitride Semiconductor Components, The Existing System For Metal-Organic Vapor Phase Epitaxy (Movpe) From Aixtron (Serial Number Cs17580) Must Be Partially Renewed And Expanded For Current And Future Research Projects. The Following Components Will Be Replaced: - The Process Pump - The Showerhead Gas Inlet - 4X Check Valves The Expansion Includes Lines For The Source Materials Triethylborane And Ethene, Which Must Be Integrated Into The System. To Do This, Appropriate Work Must Be Carried Out On The Gas Supply System (Gas Panel) For Each Material. The Materials Are Fed Into The Reactor In A Controlled Manner Using Appropriate Flow And Pressure Regulators (Listed In Detail In The Technical Description). The Complete Description Can Be Found In The Service Description.
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