Microelectronic Machinery And Apparatus – Acquisition Of A Iii-V Materials Engraving Bench For The Cea Of Grenoble. For Its Research Activities, Cea-Leti Wishes To Acquire Equipment, A Semi-Automatic Chemistry Bench For The Etching And Cleaning Of Iii-V Materials On Silicon, Indium Phosphide (Inp) Or Gallium Arsenide (Gaas) Wafers With Diameters Of 100, 150, 200 And 300 Mm For Microelectronics. This Bench Replaces An Existing Bench In The Leti Clean Room. Consequently, The Proposed Equipment Must Respect The Following Dimensions: O Length = 2500 Mm O Depth = 1700 Mm O Height = 2100 Mm The Contract Also Includes The Following Options With Optional Pricing*: O Option 1: Temperature Exchangers And Coolers (§3.2.6); O Option 2: Power Supply Transformers (§4.1.4); O Option 3: 1St Level Maintenance Training (§9); O Option 4: Advanced Maintenance Training (§9); O Option 5: Warranty Extension Of One Additional Year (§11.1); O Option 6: Provision Of A Dry Contact Indicating The Opening Of The H2so4 Or H2so5 Drain Valve (§4.2.3); O The Price Of Transport, Insurance Included, According To The Dap Cea Grenoble Conditions (Incoterms Icc 2020 Convention).
Contact Information
Address
17 rue des Martyrs
Contact No.
06 31 73 90 07
Email
nadege.jolly@cea.fr
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