Contract Award Notice |
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TRR | 5330683 |
Organization | Official name: BTU Cottbus-Senftenberg |
Tender No | 411995-2021 |
Funded By | |
Country | Germany , All Region |
Contract Value | 384,680 |
Work Detail |
Contract Award For Germany-Cottbus: Laboratory, optical and precision equipments (excl. glasses) Mask aligners for optical photolithography and nanoimprint lithography procurement of a mask aligner is intended to be lithograph for structural variables of about 1.0 micrometers, for selected structures also including, especially for nanostructuring, the mask aligner should also provide for nanoimprint lithography |
Key Dates |
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Contract Date | 26 Jun 2021 |
Contact Information |
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