Contract Award Notice |
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| TRR | 16668527 |
| Organization | Ecole Polytechnique Fédérale De Lausanne (EPFL) |
| Tender No | |
| Funded By | Self-Funded |
| Country | Switzerland , Western Europe |
| Contract Value | Plz Refer Document |
Work Detail |
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Contract Award For An Electron Beam Deposition And Oxidation System For The Center Of Micronanotechnology (CMi) Cleanroom Facility In 2023, EPFL Intends To Acquire An Electron Beam Deposition And Oxidation System For The Clean Room Facility Of Its Center Of Micronanotechnology (CMi). The Equipment Will Be Dedicated To Cutting-Edge Research On Al-Alox Josephson Junctions For Highly Coherent Superconducting Qubits And Resonators For Quantum Electrodynamics Of Circuits And Related Projects. In View Of The Needs Of EPFL And The Specific Scientific Objectives Of Its Laboratories SQIL, HQC, LPQM, Emphasis Is Placed On The Following Research Areas: • Fabrication Of Superconducting Al Films On 4 Inch Wafers And 5-10 Mm Chips • Static And Dynamic Oxidation In The Load Lock Or A Special Oxidation Chamber After The Deposition Of Metal Layers • Ion Source For Sample Preparation |
Key Dates |
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| Contract Date | 16 Jan 2024 |
Contact Information |
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